- Publication Title:
- Superior photoengraving process for semiconductor devices [with list of references]; by C. J. Taylor.
- Display Title:
- NASA contractor report CR (series). 597. Superior photoengraving process for semiconductor devices [with list of references]; by C. J. Taylor.
- Series Title:
- NASA contractor report CR (series).
- Corporate Agency Authors:
- National Aeronautics and Space Administration
- Sort Author:
- National Aeronautics and Space Administration
- Authors:
- Taylor, C. J.
- Author place:
- Washington, D.C.
- Author zip:
- 20546
- Date:
- Sept. 1966
- Publish Date ISO Format:
- 1966-09-01T00:00:00Z
- Publication Start:
- 19660901
- Publication End:
- 19660930
- Corporate/Agency Author:
- National Aeronautics and Space Administration
- Publication month:
- 4
- Publication year:
- 1966
- SuDoc number:
- NAS 1.26:(nos.)
- Description:
- cover, title, iii+36 p. il. 4°
- Notes:
- [Prepared under contract NAS 5-2755 by Westlnghouse Electric Corporation, Baltimore, Md.]
- Notes:
- [Prepared under contract NAS 5-2755 by Westlnghouse Electric Corporation, Baltimore, Md.] Φ For Sale by OTS, Commerce Dept. Paper, $2.00.
- Availability:
- Φ For Sale by OTS, Commerce Dept. Paper, $2.00.
- Monthly Catalog date:
- November 1966
- Monthly Catalog issue number:
- 862
- Monthly Catalog page number:
- 1
- Monthly Catalog issue date:
- 1966-11-01T00:00:00Z
- Monthly Catalog entry number:
- 16607
- LC Number:
- L. C. card 66-62664
- Contract Number:
- NAS 5-2755
- Record start page number:
- 65