- Publication Title:
- Measurement methods for semiconductor device industry, summary of NBS
- Display Title:
- Technical notes. 511. Measurement methods for semiconductor device industry, summary of NBS
- Series Title:
- Technical notes.
- Corporate Agency Authors:
- National Bureau of Standards and Commerce Dept.
- Sort Author:
- National Bureau of Standards
- Author place:
- Gaithersburg, MD
- Author zip:
- 20760
- Date:
- [January 1970]
- Publish Date ISO Format:
- 1970-01-01T00:00:00Z
- Publication Start:
- 19700101
- Publication End:
- 19700131
- Corporate/Agency Author:
- National Bureau of Standards
- Publication month:
- 12
- Publication year:
- 1970
- SuDoc number:
- C 13.46:(nos.)
- Description:
- p. il. 4°
- Notes:
- (Electronic Technology Division, Institute for Applied Technology.)
- Notes:
- (Electronic Technology Division, Institute for Applied Technology.) • Sent to Depository Libraries. Item 249-A
- Availability:
- * For Sale by Superintendent of Documents. Paper, 30c. and • Sent to Depository Libraries. Item 249-A
- GPO Item number:
- 249-A
- Monthly Catalog date:
- January 1970
- Monthly Catalog issue number:
- 900
- Monthly Catalog page number:
- 1
- Monthly Catalog issue date:
- 1970-01-01T00:00:00Z
- Monthly Catalog entry number:
- 965
- LC Number:
- L. C. card 65-65732; L.C. card 75-603039
- Record start page number:
- 64