Special publications. 337. Silicon device processing, proceedings of a symposium held at Gaithersburg, Md., June 2-3, 1970 [papers, with lists of references]; Charles P. Marsden, editor.
Publication Title:
Silicon device processing, proceedings of a symposium held at Gaithersburg, Md., June 2-3, 1970 [papers, with lists of references]; Charles P. Marsden, editor.
Display Title:
Special publications. 337. Silicon device processing, proceedings of a symposium held at Gaithersburg, Md., June 2-3, 1970 [papers, with lists of references]; Charles P. Marsden, editor.
Series Title:
Special publications.
Corporate Agency Authors:
National Bureau of Standards and Commerce Dept.
Sort Author:
National Bureau of Standards
Authors:
Marsden, Charles P.
Author place:
Gaithersburg, MD
Author zip:
20760
Date:
Nov. 1970
Publish Date ISO Format:
1970-11-01T00:00:00Z
Publication Start:
19701101
Publication End:
19701130
Corporate/Agency Author:
National Bureau of Standards
Publication month:
2
Publication year:
1970
SuDoc number:
C 13.10:(nos.)
Description:
x+457 p. il.
Notes:
(Institute of Applied Technology.) [Cosponsored by Committee F-1, American Society for Testing and Materials.]
Notes:
(Institute of Applied Technology.) [Cosponsored by Committee F-1, American Society for Testing and Materials.] • Sent to Depository Libraries. Item 247
Availability:
* For Sale by Superintendent of Documents. Cloth, $5.50. and • Sent to Depository Libraries. Item 247