Technical notes. 598. Methods of measurement for semiconductor materials, process control, and devices, quarterly report. Jan. 1-Mar. 31, 1971 [with lists of references]; edited by W. Murray Bullis.
Publication Title:
Methods of measurement for semiconductor materials, process control, and devices, quarterly report. Jan. 1-Mar. 31, 1971 [with lists of references]; edited by W. Murray Bullis.
Display Title:
Technical notes. 598. Methods of measurement for semiconductor materials, process control, and devices, quarterly report. Jan. 1-Mar. 31, 1971 [with lists of references]; edited by W. Murray Bullis.
Series Title:
Technical notes.
Corporate Agency Authors:
National Bureau of Standards and Commerce Dept.
Sort Author:
National Bureau of Standards
Authors:
Bullis, Murray W.
Author place:
Gaithersburg, MD
Author zip:
20760
Date:
Oct. 1971
Publish Date ISO Format:
1971-10-01T00:00:00Z
Publication Start:
19711001
Publication End:
19711031
Corporate/Agency Author:
National Bureau of Standards
Publication month:
3
Publication year:
1971
SuDoc number:
C 13.46:(nos.)
Description:
vi+48+[1] p. il. 4°
Notes:
(Electronic Technology Division, Institute for Applied Technology.) [Jointly supported by National Bureau of Standards, Defense Atomic Support Agency, Navy Strategic Systems Project Office, Navy Electronic Systems Command, Air Force Weapons Laboratory, Atomic Energy Commission, and National Aeronautics and Space Administration.]
Notes:
(Electronic Technology Division, Institute for Applied Technology.) [Jointly supported by National Bureau of Standards, Defense Atomic Support Agency, Navy Strategic Systems Project Office, Navy Electronic Systems Command, Air Force Weapons Laboratory, Atomic Energy Commission, and National Aeronautics and Space Administration.] * For Sale by Superintendent of Documents. Paper, 55c.
Availability:
* For Sale by Superintendent of Documents. Paper, 55c.