- Publication Title:
- Pantograph positioning system for inspecting microcircuits; [by R. D. Taylor and R. E. Hines].
- Display Title:
- AEC research and development report. BDX-613-932. Pantograph positioning system for inspecting microcircuits; [by R. D. Taylor and R. E. Hines].
- Series Title:
- AEC research and development report.
- Corporate Agency Authors:
- Atomic Energy Commission
- Sort Author:
- Atomic Energy Commission
- Authors:
- Taylor, R. D. and Hines, R. E.
- Author place:
- Washington, DC
- Author zip:
- 20545
- Date:
- June 1973
- Publish Date ISO Format:
- 1973-06-01T00:00:00Z
- Publication Start:
- 19730601
- Publication End:
- 19730630
- Corporate/Agency Author:
- Atomic Energy Commission
- Publication month:
- 7
- Publication year:
- 1973
- SuDoc number:
- Y 3.At 7:22/BDX-613-932
- Description:
- cover title, 16 p. il. 4°
- Notes:
- @ For Sale by National Technical Information Service, Springfield, VA 22151. Paper, $4.00.
- Availability:
- @ For Sale by National Technical Information Service, Springfield, VA 22151. Paper, $4.00.
- Monthly Catalog date:
- March 1974
- Monthly Catalog issue number:
- 950
- Monthly Catalog page number:
- 1
- Monthly Catalog issue date:
- 1974-03-01T00:00:00Z
- Monthly Catalog entry number:
- 02847
- Record start page number:
- 5