Special publication. 400-6. Semiconductor measurement technology, microelectronic test patterns, overview [with list of references; by]Martin G. Buehler.
Publication Title:
Semiconductor measurement technology, microelectronic test patterns, overview [with list of references; by]Martin G. Buehler.
Display Title:
Special publication. 400-6. Semiconductor measurement technology, microelectronic test patterns, overview [with list of references; by]Martin G. Buehler.
Series Title:
Special publication.
Corporate Agency Authors:
National Bureau of Standards and Commerce Dept.
Sort Author:
National Bureau of Standards
Authors:
Buehler, Martin G.
Author place:
Gaithersburg, MD
Author zip:
20760
Date:
Aug. 1974
Publish Date ISO Format:
1974-08-01T00:00:00Z
Publication Start:
19740801
Publication End:
19740831
Corporate/Agency Author:
National Bureau of Standards
Publication month:
5
Publication year:
1974
SuDoc number:
C 13.10:400-6
Description:
iv+20 p. il. 4°
Notes:
(Electronic Technology Division, Institute for Applied Technology.) [Jointly sponsored in cooperation with Defense Advanced Research Project Agency and Defense Nuclear Agency.]
Notes:
(Electronic Technology Division, Institute for Applied Technology.) [Jointly sponsored in cooperation with Defense Advanced Research Project Agency and Defense Nuclear Agency.] * For Sale by Superintendent of Documents. Paper, 60c. • Sent to Depository Libraries. Item 247
Availability:
* For Sale by Superintendent of Documents. Paper, 60c. • Sent to Depository Libraries. Item 247