Special publication. 400-20. Semiconductor measurement technology: Optical and dimensional measurement problems with photomasking in microelectronics [with bibliographies; by]John M. Jerke.
Publication Title:
Semiconductor measurement technology: Optical and dimensional measurement problems with photomasking in microelectronics [with bibliographies; by]John M. Jerke.
Display Title:
Special publication. 400-20. Semiconductor measurement technology: Optical and dimensional measurement problems with photomasking in microelectronics [with bibliographies; by]John M. Jerke.
Series Title:
Special publication.
Corporate Agency Authors:
National Bureau of Standards and Commerce Dept.
Sort Author:
National Bureau of Standards
Authors:
Jerke, John M.
Author place:
Washington, DC
Author zip:
20234
Date:
Oct. 1975
Publish Date ISO Format:
1975-10-01T00:00:00Z
Publication Start:
19751001
Publication End:
19751031
Corporate/Agency Author:
National Bureau of Standards
Publication month:
3
Publication year:
1975
SuDoc number:
C 13.10:400-20
Description:
iv+37 p. il. 4°
Notes:
(Optical Physics Division, Institute for Basic Standards.) [Activity supported by Defense Advanced Research Projects Agency, Arlington, Va., under ARPA order 2397, Program code 4D10.)
Notes:
(Optical Physics Division, Institute for Basic Standards.) [Activity supported by Defense Advanced Research Projects Agency, Arlington, Va., under ARPA order 2397, Program code 4D10.) * For Sale by Superintendent of Documents. Paper, $1.00. • Sent to Depository Libraries. Item 247
Availability:
* For Sale by Superintendent of Documents. Paper, $1.00. • Sent to Depository Libraries. Item 247