NBS special publication. 400-3. Semiconductor measurement technology: ARPA/NBS workshop 1, Measurement problems in integrated circuit processing and assembly; by Harry A. Schafft.
Publication Title:
Semiconductor measurement technology: ARPA/NBS workshop 1, Measurement problems in integrated circuit processing and assembly; by Harry A. Schafft.
Display Title:
NBS special publication. 400-3. Semiconductor measurement technology: ARPA/NBS workshop 1, Measurement problems in integrated circuit processing and assembly; by Harry A. Schafft.
Series Title:
NBS special publication.
Corporate Agency Authors:
National Bureau of Standards and Commerce Dept.
Sort Author:
National Bureau of Standards
Authors:
Schafft, Harry A.
Author place:
Gaithersburg, MD
Author zip:
20760
Date:
Feb. 1974
Publish Date ISO Format:
1974-02-01T00:00:00Z
Publication Start:
19740201
Publication End:
19740228
Corporate/Agency Author:
National Bureau of Standards
Publication month:
11
Publication year:
1974
SuDoc number:
C 13.10:400-3
Description:
iv + 18 + [1] p. il. 4°
Notes:
(Electronic Technology Division, Institute for Applioed Technology.) [Activity supported by Defense Advanced Research Projects Agency.]
Notes:
(Electronic Technology Division, Institute for Applioed Technology.) [Activity supported by Defense Advanced Research Projects Agency.] * For Sale by Superintendent of Documents. Paper,60c. • Sent to Depository Libraries. Item 247
Availability:
* For Sale by Superintendent of Documents. Paper,60c. • Sent to Depository Libraries. Item 247